Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System

Hui Chen; Zhendong Sun; Weijie Sun; John Tze Wei Yeow

doi:10.1109/JAS.2016.7510223

Volume 6 Issue 4

Jul. 2019

IEEE/CAA Journal of Automatica Sinica

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Article Navigation > IEEE/CAA Journal of Automatica Sinica > 2019 > 6(4): 1060-1067

Hui Chen, Zhendong Sun, Weijie Sun and John Tze Wei Yeow, "Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System," IEEE/CAA J. Autom. Sinica, vol. 6, no. 4, pp. 1060-1067, June 2019. doi: 10.1109/JAS.2016.7510223

Citation:

Hui Chen, Zhendong Sun, Weijie Sun and John Tze Wei Yeow, "Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System," IEEE/CAA J. Autom. Sinica, vol. 6, no. 4, pp. 1060-1067, June 2019. doi: 10.1109/JAS.2016.7510223

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Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System

doi: 10.1109/JAS.2016.7510223

1.
School of Computer and Information Engineering, Henan University, Kaifeng 475000, China
2.
Key Laboratory of Systems and Control, Academy of Mathematics and Systems Science, Chinese Academy of Sciences, Beijing 100190 China
3.
College of Automation Science and Engineering, South China University of Technology, Guangzhou 510641, China
4.
Systems Design Engineering, University of Waterloo, Waterloo N2L3G1, Canada

Funds:

the National Natural Science Foundation of China 61374036

the National Natural Science Foundation of China 61703142

the National Natural Science Foundation of China U1504615

the Scientific Research Key Foundation of Higher Education Institutions of Henan Province 16A413001

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Author Bio:

Hui Chen received the B.Sc., M.A.S.c degrees at the School of Electrical Engineering and Automation from Henan Polytechnic University, China, in 2006 and 2010, respectively, and the Ph.D. degree in control theory and control engineering from South China University of Technology, China in 2014. From 2011 to 2013, he was a visiting Ph.D. student in the Department of Systems Design Engineering at University of Waterloo, Waterloo, ON, Canada. He won the Best Student Paper Award from the 2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale in 2012, and Poster Award from the 34th Chinese Control Conference in 2015. He is currently with the School of Computer and Information Engineering, Henan University, China. His research interests include robust nonlinear control, and the application of nonlinear control theory to microelectromechanical system (MEMS).(e-mail: chenhuihenu@henu.edu.cn)

Zhendong Sun is currently a Researcher with the Key Laboratory of Systems Control, Academy of Mathematics and Systems Science, Chinese Academy of Sciences. He is the first author of the monographs "Switched Linear Systems-Control and Design" and "Stability Theory of Switched Dynamical Systems" (London: Springer, 2005 and 2011). He was supported by the National Distinguished Young Talents' Foundation, and is supported by the 100-talent plan of Chinese Academy of Sciences. He is an Associate Editor of IEEE Transactions on Automatic Control and a Subject Editor of International Journal of Robust and Nonlinear Control. His research interests include nonlinear control systems, switched and hybrid systems, and nano-micro-electronic systems.(e-mail: zhendong.sun@amss.ac.cn)

Weijie Sun received the M.S. degree in control theory and control engineering from Fuzhou University, China, and the Ph.D. degree in control theory and control engineering from South China University of Technology, China, in 2006 and 2009, respectively. He is currently an Associate Professor at the College of Automation Science and Engineering, South China University of Technology, China. His research interests include control theory and applications, robotics and automation, dynamical analysis and control of micro/nano devices.(e-mail: auwjsun@scut.edu.cn)

John Tze Wei Yeow (S'99-M'03-SM'08) received the B.A.Sc. degree in electrical and computer engineering, and M.A.Sc. and Ph.D. degrees in mechanical and industrial engineering from the University of Toronto, Toronto, ON, Canada, in 1997, 1999, and 2003, respectively. He is currently a Faculty Member in the Department of Systems Design Engineering at University of Waterloo, Waterloo, ON, Canada. His current research interests include developing miniaturized biomedical instruments. He is the recipient of the Professional Engineering Ontario Engineering Medal, Natural Science & Engineering Research Canada Innovation Challenge Award, Douglas R. Colton's Medal of Research Excellence, Micralyne Microsystems Design Award, Ontario Ministry of Research and Innovation's Early Researcher Award, and University of Toronto Alumni Association 7T6 Early Career Award. He is currently the Canada Research Chair in Micro/Nanodevices. He is the Editor-in-Chief of the IEEE Nanotechnology Magazine, an Associate Editor of the IEEE Transactions of Nanotechnology, and a member of the Editorial Board of Scientific Reports (Nature Publishing Group). He is a Fellow of the Engineering Institute of Canada.(e-mail: jyeow@uwaterloo.ca)
Corresponding author:
Hui Chen, e-mail: chenhuihenu@henu.edu.cn
Received Date: 2015-12-11
Revised Date: 2016-03-15
Accepted Date: 2016-06-12

Abstract

Abstract

In this paper, we present a twisting control scheme with proportional-integral-derivative (PID) sliding surface for a two-axis electrostatic torsional micromirror, and the utilization of the proposed scheme in a laser scanning system. The experimental results of set-point regulation verify that the proposed scheme provides enhanced transient response and positioning performance as compared to traditional sliding mode control. To evaluate the tracking performance of the closed-loop system, triangular waves with different frequencies are used as desired traces. With the proposed scheme the experimental results verified that the closed-loop controlled micromirror follows the given triangular trajectories precisely. A micromirror-based laser scanning system is developed to obtain images. When compared with open-loop control, the experimental results demonstrated that the proposed scheme is able to reduce the distortion of the raster scan, and improve the imaging performance in the presence of cross-coupling effect.
- Electrostatic micromirror,
- imaging,
- microelectromechanical system (MEMS),
- twisting algorithm

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References(35)

References

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Highlights

A twisting control scheme with Proportional-Integral-Derivative(PID) sliding surface for a two-axis electrostatic torsional micromirror is proposed.
A closed-loop controlled micromirror-based laser scanning system is developed.
The proposed scheme is able to reduce the distortion of the raster scan in the presence of cross-coupling effect.

Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System

doi: 10.1109/JAS.2016.7510223

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